CMTec offers a comprehensive inventory of spare parts for most of the refurbished semiconductor equipment we sell.

For a current list of items please visit our eBay store.

Not sure which part you need or don’t see the part in our current inventory? Just email us at This email address is being protected from spambots. You need JavaScript enabled to view it. and we will help you get the part you need. Include in your email your equipment brand, model number, and all information regarding the part you need as well as your complete contact information.

One of our semiconductor equipment specialists will contact you as quickly as possible and we will provide you with our signature outstanding service

We appreciate the opportunity to serve your semiconductor equipment and parts needs.